|
Standard �-Theta Lenses for 808nm
|
Part No. |
FL
(mm) |
SA
(��) |
SL
(mm) |
SAR
(mm x mm) |
MI
(mm) |
AS
(mm) |
Length (mm) |
MO
(mm) |
MT |
WD
(mm) |
PW |
|
STS-0101/094 |
97.53 |
28.00 |
75.71 |
53x53 |
10 |
18.00 |
40.00 |
90.00 |
M85x1 |
108.90 |
Yes |
|
STS-0163/094 |
158.28 |
27.60 |
156.21 |
108x108 |
12 |
20.80 |
43.30 |
89.00 |
M85x1 |
176.42 |
Yes |
|
STS-2163/094 |
158.88 |
26.80 |
150.05 |
103x103 |
20 |
29.00 |
66.00 |
128.00 |
M85x1 |
187.26 |
Yes |
|
STS-0202/094 |
196.85 |
19.00 |
130.88 |
90x90 |
30 |
43.00 |
83.10 |
132.00 |
M85x1 |
237.41 |
Yes |
|
STS-3254/094 |
248.66 |
19.20 |
168.83 |
115x115 |
30 |
47.93 |
75.50 |
130.00 |
M85x1 |
290.03 |
Yes |
|
STS-0300/094 |
294.17 |
25.00 |
258.39 |
175x175 |
20 |
35.00 |
78.00 |
128.00 |
M85x1 |
346.21 |
Yes |
|
STS-0400/094 |
397.87 |
21.40 |
303.07 |
213x213 |
20 |
33.00 |
53.00 |
118.00 |
M85x1 |
486.87 |
--- |
|
STS-0420/094 |
410.93 |
25.20 |
374.59 |
250x250 |
30 |
54.64 |
52.00 |
136.00 |
M132x1 |
468.59 |
--- |
|
STS-0555/094 |
556.24 |
21.40 |
426.26 |
290x290 |
25 |
40.00 |
65.40 |
130.00 |
M85x1 |
628.87 |
--- |
|
STS-0635/094 |
636.51 |
25.60 |
594.02 |
415x415 |
30 |
58.25 |
48.50 |
133.00 |
M110x1 |
709.51 |
--- |
|
STS-0825/094 |
803.55 |
28.00 |
642.68 |
450x450 |
30 |
54.00 |
58.00 |
130.00 |
M102x1 |
875.96 |
Yes |
Remark: FL=focal length; SA=scan angle; SL=scan length; SAR=scan area; MI=max.
input beam diameter; AS=aperture stop; MO=max. outside diameter; MT=mounting
thread; WD=working distance; PW=protective windows.
Telecentric �-Theta Lenses for 808nm
|
Part No. |
FL
(mm) |
SA
(��) |
SL
(mm) |
SAR
(mm x mm) |
MI
(mm) |
AS
(mm) |
Length (mm) |
MO
(mm) |
MT |
WD
(mm) |
PW |
|
STS-0053/094 |
56.33 |
11.00 |
21.61 |
14x14 |
10.00 |
17.50 |
55.15 |
90.00 |
M85x1 |
69.12 |
Yes |
|
STS-0075/094 |
76.78 |
9.80 |
26.40 |
19x19 |
10.00 |
32.60 |
45.00 |
70.00 |
TK60 |
103.63 |
--- |
|
STS-0080/094 |
79.55 |
21.20 |
58.15 |
39x39 |
25.00 |
27.70 |
83.40 |
107.00 |
M85x1 |
79.53 |
Yes |
|
STS-5100/094 |
105.63 |
26.80 |
96.39 |
68x68 |
12.00 |
35.00 |
85.50 |
126.00 |
M85x1 |
135.25 |
Yes |
Standard �-Theta Lenses for 980nm
|
Part No. |
FL
(mm) |
SA
(��) |
SL
(mm) |
SAR
(mm x mm) |
MI
(mm) |
AS
(mm) |
Length (mm) |
MO
(mm) |
MT |
WD
(mm) |
PW |
|
STS-0101/094 |
99.46 |
28.00 |
75.71 |
53x53 |
10.00 |
18.00 |
40.00 |
90.00 |
M85x1 |
111.17 |
Yes |
|
STS-0163/094 |
161.38 |
27.60 |
156.21 |
108x108 |
12.00 |
20.80 |
43.30 |
89.00 |
M85x1 |
179.88 |
Yes |
|
STS-2163/094 |
162.00 |
26.80 |
150.05 |
103x103 |
20.00 |
29.00 |
66.00 |
128.00 |
M85x1 |
191.26 |
Yes |
|
STS-0202/094 |
200.40 |
19.00 |
130.88 |
90x90 |
30.00 |
43.00 |
83.10 |
132.00 |
M85x1 |
241.65 |
Yes |
|
STS-3254/094 |
253.12 |
19.20 |
168.83 |
115x115 |
30.00 |
47.93 |
75.50 |
130.00 |
M85x1 |
295.61 |
Yes |
|
STS-0300/094 |
298.52 |
25.00 |
258.39 |
175x175 |
20.00 |
35.00 |
78.00 |
128.00 |
M85x1 |
351.32 |
Yes |
|
STS-0400/094 |
400.16 |
21.40 |
303.07 |
213x213 |
20.00 |
33.00 |
53.00 |
118.00 |
M85x1 |
489.16 |
--- |
|
STS-0420/094 |
419.58 |
25.20 |
374.59 |
250x250 |
30.00 |
54.64 |
52.00 |
136.00 |
M132x1 |
478.65 |
--- |
|
STS-0555/094 |
565.20 |
21.40 |
426.26 |
290x290 |
25.00 |
40.00 |
65.40 |
130.00 |
M85x1 |
638.85 |
--- |
|
STS-0635/094 |
649.59 |
25.60 |
594.02 |
415x415 |
30.00 |
58.25 |
48.50 |
133.00 |
M110x1 |
724.17 |
--- |
|
STS-0825/094 |
812.18 |
28.00 |
642.68 |
450x450 |
30.00 |
54.00 |
58.00 |
130.00 |
M102x1 |
885.11 |
Yes |
Remark: FL=focal length; SA=scan angle; SAR=scan area; MI=max. input beam
diameter; MO=max. outside diameter; MT=mounting thread; WD=working distance;
PW=protective windows.
Telecentric �-Theta Lenses for 980nm
|
Part No. |
FL
(mm) |
SA
(��) |
SL
(mm) |
SAR
(mm x mm) |
MI
(mm) |
AS
(mm) |
Length (mm) |
MO
(mm) |
MT |
WD
(mm) |
PW |
|
STS-0053/094 |
57.39 |
11.00 |
21.61 |
14x14 |
10 |
17.50 |
55.15 |
90.00 |
M85x1 |
70.56 |
Yes |
|
STS-0075/094 |
78.18 |
9.80 |
26.40 |
19x19 |
10 |
32.60 |
45.00 |
70.00 |
TK60 |
105.56 |
--- |
|
STS-0080/094 |
80.96 |
21.20 |
58.15 |
39x39 |
25 |
27.70 |
83.40 |
107 |
M85x1 |
81.30 |
Yes |
|
STS-5100/094 |
107.19 |
26.80 |
96.39 |
68x68 |
12 |
35.00 |
85.50 |
126 |
M85x1 |
137.17 |
Yes |
Standard �-Theta Lenses at 633nm
|
Part No. |
FL
(mm) |
SA
(��) |
SL
(mm) |
SAR
(mm x mm) |
MI
(mm) |
AS
(mm) |
Length (mm) |
MO
(mm) |
MT |
WD
(mm) |
|
STS-0155/123 |
154.63 |
11.00 |
59.28 |
40x40 |
15.00 |
40.00 |
50.00 |
70.00 |
No thread |
192.00 |
Remark: FL=focal length; SA=scan angle; SL=scan length; SAR=scan area; MI=max.
input beam diameter; AS=aperture stop; MO=max. outside diameter; MT=mounting
thread; WD=working distance; PW=protective windows.
Standard �-Theta Lenses at 633nm
|
Part No. |
FL
(mm) |
SA
(��) |
SL
(mm) |
SAR
(mm x mm) |
MI
(mm) |
AS
(mm) |
Length (mm) |
MO
(mm) |
MT |
WD
(mm) |
|
STS-0075/123 |
74.79 |
10.40 |
27.00 |
19X19 |
10.00 |
31.00 |
45.00 |
70.00 |
No thread |
100.30 |
|
STS-1088/093 |
87.48 |
15.80 |
48.22 |
34X34 |
7.00 |
34.00 |
55.00 |
98.00 |
TK87 |
116.61 |
|
STS-0093/123 |
89.02 |
17.00 |
51.96 |
36X36 |
16.00 |
34.00 |
62.05 |
83.00 |
No thread |
113.37 |
|
STS-1100/123 |
100.59 |
12.00 |
42.16 |
30X30 |
10.00 |
53.30 |
92.00 |
155.00 |
TK145 |
221.34 |
|
STS-1114/093 |
156.06 |
20.00 |
108.80 |
77X77 |
10.00 |
53.30 |
92.00 |
155.00 |
TK145 |
223.27 |
|
STS-0200/123 |
203.55 |
15.00 |
105.79 |
75X75 |
20.00 |
116.50 |
93.95 |
142.00 |
TK133 |
235.97 |
Standard �-Theta Lenses at 670nm
|
Part No. |
FL
(mm) |
SA
(��) |
SL
(mm) |
SAR
(mm x mm) |
MI
(mm) |
AS
(mm) |
Length (mm) |
MO
(mm) |
MT |
WD
(mm) |
|
STS-1088/093 |
87.96 |
15.80 |
48.50 |
34X34 |
7.00 |
34.40 |
55.00 |
98.00 |
TK87 |
116.27 |
|
STS-1114/093 |
157.32 |
20.00 |
109.65 |
77X77 |
10.00 |
53.30 |
92.00 |
155.00 |
TK145 |
223.00 |
|
STS-040/093 |
157.47 |
19.60 |
107.73 |
76X76 |
5.00 |
53.40 |
90.00 |
155.00 |
TK145 |
225.22 |
Remark: FL=focal length; SA=scan angle; SAR=scan area; MI=max. input beam
diameter; MO=max. outside diameter; MT=mounting thread; WD=working distance;
PW=protective windows.
Standard �-Theta Lenses at 405nm
|
Part No. |
FL
(mm) |
SA
(��) |
SL
(mm) |
SAR
(mm x mm) |
MI
(mm) |
AS
(mm) |
Length (mm) |
MO
(mm) |
MT |
WD
(mm) |
PW |
|
STS-3160/173 |
175.86 |
25 |
154.76 |
110x110 |
6.00 |
21.10 |
36.75 |
89 |
M85x1 |
220.73 |
Yes |
|
STS-0375/173 |
375.32 |
31 |
420.36 |
300x300 |
10.00 |
35.50 |
48.00 |
116 |
M92x1 |
447.46 |
---- |
|
STS-0580/173 |
594.12 |
22 |
466.36 |
326x326 |
10.00 |
39.00 |
37.96 |
89 |
M85x1 |
686.46 |
Yes |
Remark: FL=focal length; SA=scan angle; SL=scan length; SAR=scan area; MI=max.
input beam diameter; AS=aperture stop; MO=max. outside diameter; MT=mounting
thread; WD=working distance; PW=protective windows.
Telecentric �-Theta Lenses at 405nm
|
Part No. |
FL
(mm) |
SA
(��) |
SL
(mm) |
SAR
(mm x mm) |
MI
(mm) |
AS
(mm) |
Length (mm) |
MO
(mm) |
MT |
WD
(mm) |
PW |
|
STS-8050/173 |
55.03 |
22.80 |
42.10 |
29x29 |
7.50 |
16.20 |
52.00 |
90.00 |
M85x1 |
67.20 |
---- |
�-Theta Lens for Mask Imaging for Excimer Laser at 248nm
|
Part No. |
FL
(mm) |
SA
(��) |
Magnification |
SAR
(mm x mm)
|
MI
(mm) |
Length (mm)
|
MO
(mm) |
MT |
WD
(mm) |
|
STS-4200/198 |
221.10 |
14.00 |
0.33 |
200X200 |
10X10 |
38.6 |
88 |
M85x1 |
303.60 |
Remark: FL=focal length; SA=scan angle; SAR=scan area; MI=max. input beam
diameter; MO=max. outside diameter; MT=mounting thread; WD=working distance;
PW=protective windows.
Standard �-Theta Lenses for Excimer Laser at 193nm
|
Part No. |
FL
(mm) |
SA
(��) |
SL
(mm) |
SAR
(mm x mm) |
MI
(mm) |
AS
(mm) |
Length (mm) |
MO
(mm) |
MT |
WD
(mm) |
|
STS-4056/198 |
56 |
18.8 |
25X25 |
7 |
15 |
34 |
87 |
M85X1 |
71.36 |
Yes |
|
STS-4057/198 |
66.24 |
19.2 |
30X30 |
7 |
15 |
34 |
87 |
M85X1 |
83.78 |
Yes |
Remark: FL=focal length; SA=scan angle; SL=scan length; SAR=scan area; MI=max.
input beam diameter; AS=aperture stop; MO=max. outside diameter; MT=mounting
thread; WD=working distance; PW=protective windows.
Standard �-Theta Lenses at 1550nm
|
Part No. |
FL
(mm) |
SA
(��) |
SL
(mm) |
SAR
(mm x mm) |
MI
(mm) |
AS
(mm) |
Length (mm) |
MO
(mm) |
MT |
WD
(mm) |
PW |
|
STS-3100/008 |
100.1 |
22.0 |
76.9 |
55x55 |
10.0 |
18.0 |
40.0 |
90.0 |
M85 |
112.0 |
Yes |
|
STS-2250/008 |
277.1 |
21.4 |
205.6 |
142x142 |
15.0 |
31.0 |
61.0 |
105.0 |
M85 |
346.1 |
Yes |
|
STS-5163/008 |
163.1 |
18.8 |
104.0 |
73x73 |
15.0 |
32.2 |
183.32 |
135.0 |
M85 |
155.4 |
Yes |
Remark: FL=focal length; SA=scan angle; SL=scan length; SAR=scan area; MI=max.
input beam diameter; AS=aperture stop; MO=max. outside diameter; MT=mounting
thread; WD=working distance; PW=protective windows.
|
Model |
F.L.
mm |
WD
mm |
Scan area
mm |
Scan Angle
θmax |
E.P.
mm |
Spot
�m |
D1
mm |
D2
mm |
Screw |
Outline |
|
STY-1550-110-160 |
160 |
180 |
Φ155/110�110 |
�28� |
12 |
18 |
36 |
90 |
M85�1 |
Fig.1 |
|
